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QuickPRO-3D™

Bench-Top, High-Speed, High-Accuracy, Non-Contact

3D Surface Profiler

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SYSTEM CHARACTERISTICS

  • Compact, bench-top unit with environmental enclosure

  • Non-contact chromatic confocal sensor (Point or Line Scan)

  • 3D surface topography and transparent film thickness

  • Integrated CMOS camera with co-axial or ring illumination

  • Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings 

  • Available vacuum chucks for sample/tray holding

  • User friendly CalcuSurf3D™ Recipe Generation, Data Acquisition, and Surface Analysis software permits optimized measurement sampling density for best coverage at highest throughput

  • Extensive 3D Surface plotting and data reporting functions conforming to DIN ISO

 

APPLICATIONS

  • Lenses (single & trays)​

  • Diamond-turned parts & molds​

  • MEMS​

  • Semiconductor​

  • Advanced Packaging​

  • 3D Printed Products​

  • Micro-fluidic cells​

  • LED & OLED​

  • Transparent films

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QuickPRO-CUBE™ Mini

High-speed, dual-surface, geometry characterization 

of single or in-tray optical components

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By integrating a pair of single-point, non-contact, nanometer-resolution chromatic confocal sensors with high-speed, nanometer-encoded X/Y/Z coordinated motion, the QuickPRO-CUBE™ captures simultaneous front, back and datum surface 3D point cloud topography for the geometric characterization of single lenses or micro lenses in trays. The form invariant motion architecture permits measurement of both rotationally symmetric and more complex non-axially symmetric or freeform shapes to a maximum measurement diameter of 50mm (up to 75mm OD). The total measurement time is from 30sec to 240sec per surface per lens, depending on the lens diameter and 3D point cloud sampling density. 

 

Measured geometric parameters include:

  • Front-to-Back surface Vertex Offset relative to defined centration datum

  • Front-to-Back surface Wedge Angle relative to defined tilt datum

  • Front-to-Back Total Thickness variation (TTV) and Center Thickness (CT)

  • Front and Back surface Sag/Form error

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SYSTEM CHARACTERISTICS

  • Compact, bench-top unit with environmental enclosure

  • Dual single-point, non-contact, visible-light, chromatic confocal sensors with 8kHz combined measuring rate

  • Vibration insensitive and dimensionally stable Invar metrology frame 

  • Nanometer encoded X/Y/Z coordinated motion with magnetic linear motors and cross roller bearings for fast raster or spiral scanning over 50mm (X), 50mm (Y), 50mm (Z)

  • Self-centering fixture with precision quick connect for fast load/unload

  • Fixtures for both single optical components (up to 75mm OD) and micro-lens trays 

  • User-friendly QuickPRO™ instrument control and data acquisition software for sensor optimization, auto-centering, data capture and coordinated motion sequencing

  • CalcuSurf-3D™ view and analyze software for multi-surface 3D point cloud data

 

APPLICATIONS​

The CUBE is specifically designed for factory-floor QA of polished, molded, or diamond turned optical components, including optically opaque infrared materials and metals. An added advantage is the ability to measure multiple smaller lenses in-tray or lens arrays during a single measurement sequence. 

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QuickOCT-4D™

Bench-Top, High-Speed, High-Accuracy, Non-Contact

4D Surface & Thick-Film Profiler

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Combining a single-point, visible-light, spectral-domain optical coherence tomography (SD-OCT) sensor with a high-speed, nanometer-encoded X/Y/Z motion-control stage, the QuickOCT-4D™ can capture the plane of each layer within transparent film samples in a single measurement, at up to 66 kHz. The QuickOCT-4D™ penetration depth (up to 100µm) and axial resolution (5nm) is optimized for the measurement of multi-layer transparent films, flat substrates, and functional layers in the semi-conductor, life science and pharmaceutical industries.

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SYSTEM CHARACTERISTICS

  • Compact, bench-top unit with environmental enclosure

  • Single-point, non-contact, visible-light, Spectral-Domain Optical Coherence Tomography (SD-OCT) sensor with up to 66 kHz measuring rate

  • Optimized for measuring topography and thickness of multi-layer transparent films on highly reflective material

  • Nanometer encoded X/Y/Z motion with magnetic linear motors and cross roller bearings for fast raster or spiral scanning over 100mm (X), 100mm (Y), 50mm (Z)

  • Available vacuum chucks for sample and tray holding

  • User-friendly CalcuSurf-4D™ recipe generation, data acquisition, surface topography and multi-layer film analysis software permits optimized measurement sampling density for best coverage at highest throughput

 

APPLICATIONS​

An ideal application for the QuickOCT-4D™ is the measurement of patterned photoresist (or similar transparent coatings) on a silicon, GaAs or glass wafer for backend semiconductor, advanced packaging, display, LED, VCSEL and MEMS as a quality control post-develop and pre-etch.

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